Tencor Alpha-Step 500 Surface Profiler
Description:The Tencor Profiler is a metrology tool that generates a 2 dimensional profile of the surface of a sample. This is done by a stylus, which touches the surface of a sample and runs across a prescribed length.
Accuracies for the three different profile ranges are:
13 um range = +/- 25 A
300 um range = +/- 50 A
2 mm range = +/- 200 A
Tencor P-2 Long Scan Profiler
Description:
The Tencor Profiler is a metrology tool that generates a 2 dimensional profile of the surface of a sample. This is done by a stylus, which touches the surface of a sample and is scanned across a prescribed length. Step heights and widths of structure can be measured in this way.
This scanner differs from the Alpha step through longer scan lengths and motorized stage.
