SUSS PM 5 Analytic Probe

analytic.jpg (63416 bytes)

CAMD refurbished a Suss microprobe station to perform resist adhesion test.  The apparatus is equipped with a 10 lb. linear motor, two microprobes and a CCD camera for observation.

  • Capable of removing PMMA bonded sheets from Si
  • Fine probing of microstructures

Back to Equipment