The Hitachi S-4500 II cold field emission scanning electron microscope is used to image features at magnification ranging from 20x to 500,000x.
Resolution depends on operating conditions:
1.5 nm (at 15 kV accelerating voltage, WD 4 mm)
4.0 nm (at 1kv accelerating voltage, WD 3mm).
Accelerating voltage can vary continuously from 0.5 kV for resist imaging to 30 kV for EDS detection and metallic surface imaging.
Stage motion ranges:
X: 0 to 100 mm
Y: 0 to 50 mm
Z: 3 to 28 mm (continuous)
Tilt: -5º to +45º
Rotation: 360º (continuous)
The image capture software was updated in 2003 with Quartz PCI version 5.1.
The EDAX detector is used for advanced materials characterization of energy dispersive X-ray microanalysis (EDS).