The Hitachi S-4500 II cold field emission scanning electron microscope is used to image features at magnification ranging from 20x to 500,000x. 

Resolution depends on operating conditions:

1.5 nm (at 15 kV accelerating voltage, WD 4 mm)
4.0 nm (at 1kv accelerating voltage, WD 3mm).  

Accelerating voltage can vary continuously from 0.5 kV for resist imaging to 30 kV for EDS detection and metallic surface imaging.

Stage motion ranges: 

X:  0 to 100 mm
Y:  0 to 50 mm
Z:  3 to 28 mm (continuous)
Tilt:  -5º to +45º
Rotation:  360º (continuous)

The image capture software was updated in 2003 with Quartz PCI version 5.1.

The EDAX detector is used for advanced materials characterization of energy dispersive X-ray microanalysis (EDS). 

PDF documents:

• SEM Procedures.pdf (SEM Standard Operation Procedures)
• The Compact Detector Unit.pdf  (EDAX detector information)

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