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Conventional Machining

• Engis Lapping and Polishing Machine
• MET One particle Counter
• Sand Blaster Cabinet
• Flycutting Machine

Lithography Equipment

• Mann 3600 Pattern Generator
• Oriel UV Exposure Station with Aligner
• Quintel UL7000-OBS Aligner and DUV Exposure Station

Metrology Equipment

• AFT 210XP Nanospec
• Digital Instrument 3100 SPM & Hysitron Nano Indenter
• Hitachi S-4500II Field Emission SEM
• Hitachi U-2001 NIR-UV-VUS Spectrophotometer
• Nikon MM-22U Measuroscope
• Nikon OPTIPHOT-88 Optical Microscope
• OXFORD Plasmalab System 400 Magnetron Sputtering System
• OXFORD RIE/ECR 100 System
• Oxford Ionfab System 300+ Ion Mill
• SUSS PM 5 Analytic Probe
• Tencor Alpha-Step 500 Surface Profiler
• Tencor P-2 Long Scan Profiler
• TA Thermal Analyzer with DSC, TGA, and DMA
• WYKO NT3300 Surface Profiler
• ZYGO Mark Ivxp Interferometer

Processing Equipment

• Bransen Plasma Asher
• Headway Research PWM101 Light Duty Photoresist Spinner
• Headway Research PWM103 Heavy Duty Photoresist Spinner
• Hot Plate Station
• CP Horizontal Airflow Oven
• Denton Plasma Coating
• M206 Mechanical Convection Oven
• M326 Mechanical Convection Oven
• VT5042 EKP500 Vacuum Oven
• Temescal BJD-1800 E-Beam Deposition System
• 4' VA Stainless Steel Hood, 6' VA Polypropylene Hoods, 8' AC Polypropylene Hood