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CAMD Cleanroom Chemical List

Chemicals designated by (*) will not be provided by CAMD. Those designated by (^) are not routine inventory. Contact Shaloma Malveaux, smalvea@lsu.edu, to order. Allow (2) weeks for delivery. All others will be provided as part of the general inventory.  The listed chemicals are the only chemicals that are approved for use inside the cleanroom.  If there are any other chemicals that you need to use that are not on this list, contact the Safety Director, Dr. Lorraine Day, day@lsu.edu, 225-578-4616 for approval.

    Resists

 

Developers

*AZ 1505
*AZ 1512
*AZ 1518

Shipley 1805
Shipley 1808
Shipley 1827
*SPR 220-3
*SPR 220-7

*SU8 Resist 5-25
*SU8 Resist 50-100
*SU8 2000 Series

Olin PMMA 9%

Microchem PMMA 9%,
*Microchem PMMA 10%
*Microchem PMMA 12%, 15%

 

AZ 400k

Shipley 351 Concentrate Solution(replaces Shipley 354)
*Shipley MF 321, 322 (ion free)
*Shipley MF CD series (ion free)

SU8 Developer

General Use

 

Acids (requires training for use)

Acetone
Iso Propyl Alcohol
Methyl Isobutyl Ketone
Tri chloroethane
Hydrogen Peroxide
^Sodium Hydroxide
^Potassium Hydroxide
Methanol
Methyl Methacrylate

 

Acetic
Hydrochloric
Nitric
Sulfuric
Hydrofluric

Etchants

 

Miscellaneous

Gold
Chrome

 

^Nano Remover PG
^ Microstrip Remover 1165

Note: Underlined chemicals have link for Technical Data Sheets and or Website.  All chemical

MSDS sheets are located on the Safety MSDS Page