How to fill out the EXPOSURE REQUEST FORM?
To reflect the beamlines upgrade and availability and to serve user better the EXPOSURE REQUEST FORM (the Form) has been revised in January 2002.
The Form consists of 4 parts need be filled:
Most of fields are straightforward. The following are some basic guidelines to help filling some of important fields.
User should have a Project Reference Number (PRN) before submitting the Form. To obtain a PRN number, a Project Proposal Form should be submitted and approved. (See Project Proposal Form, http://www.camd.lsu.edu/forms/project_proposal_form.pdf ) The fields of the Contact Person and his (or her) Phone number and E-mail address must be completed to ensure that someone can be reached under any circumstances.
The Sample Name should be unique. Some beamlines (XRLM1 and XRLM2) do not accept the used sample name and also give an error message when using the same name for different substrates.
We have 4 standard Mask Formats: standard NIST, modified NIST, large format and 4” stainless steel ring. They fit the scanner on all beamlines. The dimensions of these mask rings can be found from the ring drawing files.
To modify or design their own mask rings, user should consult with Microfabrication Group staff at CAMD to make sure that the ring will fit the scanner fixtures.
User should supply the information about the Mask Membrane Material and Thickness for dose calculation in case the change in beamline or beam energy or other exposure parameters requires a new calculation of the exposure dose.
The CAMD storage ring is normally operating at 1.3 GeV Ring Energy. Higher ring energy operation is available upon request and will be planned and announced before the operation.
At present, there are 3 beamlines operational: XRLM1, XRLM2 and XRLM3. The basic characteristics of each beamline including thickness of Beryllium window, available Filter Material and Thickness, and any special features of the scanner such as overlay or cooling capabilities can be found in CAMD beamlines web page. (Link to http://www.camd.lsu.edu/beamlines.htm) Information on this webpage will be updated as change occurs. User can choose either one of beamlines to expose their samples. However, it subjects to change depending upon availability of the beamlines.
User should calculate the Dose for their samples based on the chosen beamline, filters, and Scan Length along with mask parameters, Minimum Bottom Dose and Maximum Ratio of Top to Bottom Dose. Exposures at XRLM1 and XRLM2 beamlines require the value of Dose per cm, which is simply the total dose divided by the total scan length in cm. In case the chosen beamline is not available, user or CAMD staff should re-calculate the dose for the exposure at another beamline available at this time.
In some cases, trained and approved users can perform their own exposures at XRLM2 and XRLM3 beamlines. CAMD will consider this option on the case by case basis. XRLM 1 at this point will be operated by CAMD staff only.
After the exposure is completed the operator should sign the Form and return it to the Print Shop Manager who will then contact the user.