Beamlines
  Micromachining X-ray Lithography
   
 

Micromachining I (XRLM1), Port 2A, 10 mrad (Updated)

 
    • X-ray lithography beamline for microfabrication.
    • Two mode of operation, "white" and "mirror" light.
    • Two Beryllium windows, 100 µm and 120 µm.
    • Distance source point - mask plane 10.35 meter.
    • DEX 02 scanner, from Jenoptik GmbH.
 

Micromachining II (XRLM2), Port 2B, 10 mrad (Updated)

 
    • X-ray lithography beamline for microfabrication.
    • Full spectrum, "white light" beamline.
    • Two Beryllium windows, 250 µm and 150µm thick.
    • Distance source point - mask plane 10.7 meter.
    • DEX 01 scanner, from Jenoptik GmbH.

* XRLM 1 & 2 are jointly operated with the IfM Organization at LA Tech University.

 
 

Micromachining IV (XRLM4)Wiggler Port, 6.5 mrad
 
    • X-ray lithography beamline for microfabrication.
    • Wiggler spectrum, "white light" beamline.
    • One Beryllium window, 175 µm thick.
    • High-energy X-ray spectrum; deep-etch capability.
    • DEX 03 scanner, from Jenoptik GmbH
   
  IR, Vacuum UV, & Soft X-ray
   
 

3-meter Normal Incidence Monochromator (NIM), Port 3B, 70 mrad
 
    • High-resolution, high-flux beamline, range 2 - 50 eV,
      resolving power 10,000 (high energy) - 50,000 (low energy)
    • Dedicated SES-200 analyzer endstation for ARUPS measurement.
    • A “second tail” allows deflection of the highly resolved monochromatic beam to a second, user-selected or provided, endstation.
    • Click here (pdf) for more details.
 

Varied-Line-Space Plane Grating Monochromator Beamline(VLSPGM), Port 4A, 7 mrad
 
    • High-resolution soft x-ray beamline, range 200 -1200 eV
    • Resolving power 5000
    • NEXAFS, XAS, MCD measurements
    • Click here(pdf) for more details.

    ex. of research done on the PGM beamline: surface science.
 

3-meter Toroidal Grating Monochromator (TGM/3m), Port 6B, 24 mrad
 
    • Range 15 - 150 eV with resolving power 1000.
    • High flux, moderate resolution, ARUPS.
    • Click here for more details.
 

Infrared Microspectroscopy Beamline(IR), Port 1A, 50 mrad
 
    • Nicolet FT-IR spectrometer and Microscope, range 400 – 11700 cm-1
    • Transmission and reflection modes
    • Infrared 1D and 2D mapping with spatial resolution 10 µm
    • Click here(pdf) for more details.
   
 

X-ray

X-ray Emission Line Energies Chart (By Element)
X-ray Emission Line Energies Chart (By Energy)
Reference X-ray Spectra for Metal Foils
   
 

Double-Crystal Monochromator (DCM), Port 5B, 2 mrad
 
    • Click here(pdf) for more details.
    • Click here for DCM schedule.
 

Powder Diffraction Beamline (XPD),Port 7A; Currently, XRD is being done at the high-energy wavelength-shifter beamline, Port 3A.
 

    Hardware

    • Energy range 4 to 10 keV (CrKa to Zn Ka)
    • Double crystal monochromator with silicon 111 and germanium 220 crystals. The latter should increase the flux ca. 10 X at some cost to the resolution.
    • Huber four-circle goniometer capable of step size as low as .00010
    • Canberra high purity germanium solid state detector
    • Typical runs can be from 2o to 110otheta.
    • Special sample holders with zero-background substrate (silicon 510) and (quartz, cut 6o from 0001) with 50µm sample depth are available for very small quantities of samples.

    Data Analysis

    • MDI's Jade software which automates many traditional powder diffraction analysis, such as search-match, peak profile, quantitation with whole profile fitting, etc.
    • International Center for Diffraction Data's Powder Diffraction File (PDF-2) database consisting of more than 70,000 inorganic entries.
    • International Crystal Structure Database with more than 80,000 entries.

    For more details click here.

 

Protein Crystallography MAD Beamline (GCPCC)
 
    • Energy range 7.0 - 17.5 keV with resolution of 3 eV, suitable for macromolecular crystallography MAD phasing.
      Click here for further details.
 

Tomography
 
    • Energy range 6.0 - 35 keV with resolution 1-3%
      Click here for further details.
 

SAXS - Small Angle X-ray Scattering Beamline
 
    • Double-crystal monochromator with energy range from ~3-14KeV
    • 200mmx200mm multiwire gas detector
    • Sample to detector distance adjustable from 0.9m to 4.9m
    • Click here for further details.
 

X-ray Microprobe (XMP), Port 5A, 2 mrad
 
    • Double-crystal monochromator , Kirkpatrick-Baez focusing
      optics yielding 20 micron (vertical) x 40 micron (horizontal)
      spot size. Germanium diode detector.
    • Click here (pdf) for more details.
   
   
 

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